发明名称 |
Micromechanical Microphone Device and Method for Producing a Micromechanical Microphone Device |
摘要 |
A micromechanical microphone device includes a membrane that is mounted in an elastically deflectable manner above a substrate and that has at least one gate electrode. The device further includes a source region and a drain region provided in or on the substrate with a channel region therebetween. The channel region is at least partly covered by the gate electrode and is spaced apart from the gate electrode by a gap. The membrane is deflectable under the influence of sound in such a way that the gap is variable.
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申请公布号 |
US2012189143(A1) |
申请公布日期 |
2012.07.26 |
申请号 |
US201213343532 |
申请日期 |
2012.01.04 |
申请人 |
BUHMANN ALEXANDER;FEYH ANDO;ROBERT BOSCH GMBH |
发明人 |
BUHMANN ALEXANDER;FEYH ANDO |
分类号 |
H04R1/00;H01L21/306 |
主分类号 |
H04R1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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