SEMICONDUCTOR DEVICE EVALUATION APPARATUS AND SEMICONDUCTOR DEVICE EVALUATION METHOD

摘要

A semiconductor device evaluation apparatus includes a current measurement portion that measures a current value at multiple times included in a period from the beginning of application of a voltage to a semiconductor device to a steady state of the current value flowing through the semiconductor device; a period division portion that divides the period into a first period and a second period later than the first period and finds a curve approximately representing a temporal change in a current value measured at time included in the second period so that a difference between a current value measured at the time included in the first period and a current value found by extrapolating the curve at the same time becomes greater than a specified threshold value; and a current estimation portion that estimates a current value flowing through the semiconductor device at the start time.