发明名称 Controlling Thickness of Residual Layer
摘要 Methods for manufacturing a patterned surface on a substrate are described. Generally, the patterned surface is defined by a residual layer having a thickness of less than approximately 5 nm.
申请公布号 US2012189780(A1) 申请公布日期 2012.07.26
申请号 US201213429903 申请日期 2012.03.26
申请人 LABRAKE DWAYNE L.;KHUSNATDINOV NIYAZ;JONES CHRISTOPHER ELLIS;XU FRANK Y.;MOLECULAR IMPRINTS, INC. 发明人 LABRAKE DWAYNE L.;KHUSNATDINOV NIYAZ;JONES CHRISTOPHER ELLIS;XU FRANK Y.
分类号 C08J7/04;B05D3/00;B05D5/00 主分类号 C08J7/04
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