SINGLE CRYSTAL MANUFACTURING DEVICE AND SINGLE CRYSTAL MANUFACTURING METHOD

摘要

The present invention is a single crystal manufacturing device having a crucible for accommodating a raw material melt, a heater for heating the raw material melt, cooling tubes which are forcibly cooled by a cooling medium, and a cooling chamber for accommodating the same, the device being characterized in that a heat-blocking member having a thermal insulating material is disposed in the vicinity of an interface between the raw material melt and a single crystal undergoing upward pulling, so as to surround the single crystal undergoing upward pulling; the cooling tubes are disposed above the heat-blocking member so as to surround the single crystal undergoing upward pulling; and a cooling tube outer periphery thermal insulating material is disposed surrounding the cooling tubes with a spacing being provided from the outer periphery of the cooling tubes. There is thereby provided a single crystal manufacturing device and manufacturing method capable of improving productivity and yield of single crystals and of minimizing power consumption by improving the cooling capacity of the cooling tubes without causing solidification or dislocation to occur on the melt surface, and by increasing the upward pulling speed during the manufacture of a defect-free single crystal.