THERMAL DIFFUSION CHAMBER WITH HEAT EXCHANGER

摘要

A diffusion chamber, precluding migration and leakage of the gaseous selenide species to atmosphere during the processing of solar panel substrates, the chamber comprising a frame supporting a containment chamber having a sealed process chamber confined within, a first fluid handling system/heat source module in fluidic communication with an exterior of the sealed process chamber, and a second fluid handling system/heat source module in fluidic communication with an interior of the sealed process chamber.