发明名称 LIQUID VAPORIZER
摘要 <p>The invention provides a liquid vaporizer (100) that vaporizes a chemical solution supplied from a chemical solution supply port and mixes same into a gaseous medium. The liquid vaporizer (100) is provided with a main vaporizer body (110) having a mixed gas-generating space (116), and a vaporizing part (120) disposed inside the mixed gas-generating space (116). The vaporizing part (120) has a main vaporizing part body (121) whereon a vaporization surface (87) is formed and a reticular body (69) formed as a sheet by weaving wires evenly into a mesh. The reticular body (69) forms multiple mesh spaces that are spaces surrounded by the wires and are disposed in a regular pattern in the plane of the reticular body (69). The vaporizing part (120) forms multiple chemical solution-supplying spaces that are spaces surrounded by the wires and the vaporization surface (87) as a result of the reticular body (69) and the vaporization surface (87) contacting each other and that are disposed in a regular pattern in the plane of the reticular body (69).</p>
申请公布号 WO2012098730(A1) 申请公布日期 2012.07.26
申请号 WO2011JP69960 申请日期 2011.09.01
申请人 CKD CORPORATION;KOUKETSU, MASAYUKI;ITAFUJI, HIROSHI 发明人 KOUKETSU, MASAYUKI;ITAFUJI, HIROSHI
分类号 B01J7/02;H01L21/027;H01L21/304 主分类号 B01J7/02
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