| 摘要 |
<P>PROBLEM TO BE SOLVED: To focus on a specimen with accuracy. <P>SOLUTION: An automatic focus mechanism 10 includes: an illumination optical system 11 for collecting illumination light projected onto a specimen A with a cover glass 5 in a line shape; an objective lens 13 for projecting the illumination light collected in a line shape onto the specimen A and collecting reflection light from the cover glass 5; a detection unit 15 having an imaging surface 36 disposed obliquely with respect to an optical axis of the reflection light collected by the objective lens 13 and for photographing the reflection light and detecting image information; and a focus adjustment unit 17 for relatively moving the objective lens 13 and the specimen A with the cover glass 5 in the optical axis direction so that the highest position of light intensity in the image information detected by the detection unit 15 is positioned on the optical axis of the reflection light. <P>COPYRIGHT: (C)2012,JPO&INPIT |
