| 摘要 |
<P>PROBLEM TO BE SOLVED: To shorten data acquisition time even when there is a part where shape change per unit distance is large in a specimen. <P>SOLUTION: The three-dimensional shape measuring device comprises: an irradiation part 21 for irradiating a specimen with inspection light; a moving part for relatively moving the inspection light and the specimen; an imaging part 22 for imaging the specimen irradiated with the inspection light and outputting an imaging result; a coordinate calculation part 53 for calculating a three-dimensional shape of the specimen with an interval in a direction of the relative movement based on the imaging result by the imaging part 22; and a control part 41 for changing the interval according to the shape of the specimen. <P>COPYRIGHT: (C)2012,JPO&INPIT |
