| 摘要 |
A plasma generation device (30) with a simple configuration, which generates electromagnetic plasma by emitting electromagnetic waves in a target space (51), wherein electromagnetic plasma is generated in a plurality of locations by relatively low electromagnetic wave energy. The plasma generation device (30) is provided with: an antenna (36) for emitting, to the target space (51), electromagnetic waves supplied from an electromagnetic-wave generator (33); a discharger (35) in the target space (51) which forcibly discharges free electrons from gas molecules; and electric field concentration members (40) that concentrate electric fields generated by electromagnetic waves emitted from the antenna (36). The electric field concentration members (40) are arranged so as not to contact the antenna (36). The plasma generation device (30) generates electromagnetic plasma in the vicinity of the electric field concentration members (40) and in the vicinity of the antenna (36) by emitting electromagnetic waves from the antenna (36) while also discharging free electrons from the discharger (35). |
