发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR LIGHT EMMITING DEVICE
摘要 According to one embodiment, in a method for manufacturing a semiconductor light emitting device, a transparent conductive film is formed on a semiconductor laminated body of a multilayer structure containing a light emitting unit. The transparent conductive film is a film transmissive to a light of a luminescence wavelength from the light emitting unit. A mask is formed on the portion of the transparent conductive film. The transparent conductive film is removed by wet etching through the mask so as to expose the semiconductor laminated body. The semiconductor laminated body is removed by anisotropically etching through the mask so as to remove the light emitting unit. The mask is removed. A first electrode is formed on the portion of the semiconductor laminated body exposed after removing the light emitting unit. A second electrode is formed on the portion of the transparent conductive film.
申请公布号 US2012190146(A1) 申请公布日期 2012.07.26
申请号 US201113239152 申请日期 2011.09.21
申请人 SHIBATA KYOHEI;KABUSHIKI KAISHA TOSHIBA 发明人 SHIBATA KYOHEI
分类号 H01L33/42 主分类号 H01L33/42
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