发明名称 NONVOLATILE MEMORY DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a nonvolatile memory device and a manufacturing method of the same. <P>SOLUTION: A nonvolatile memory device comprises a memory string including a plurality of memory cells connected in series, and a first and a second selection transistors respectively connected with both end parts of the memory string. The memory string includes a first semiconductor layer 145 and a second conductive layer 125 contacting the first semiconductor layer 145 via a memory gate insulation film. The first and the second selection transistors includes a second and a third semiconductor layers 165A, 165B connected to one end and another end of the first semiconductor layer 145, respectively. The second conductive layer 125 includes a fourth semiconductor layer 165C contacting the first semiconductor layer 145 in a region on which the second conductive layer 125 is not arranged. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012142558(A) 申请公布日期 2012.07.26
申请号 JP20110230287 申请日期 2011.10.20
申请人 SK HYNIX INC 发明人 LEE SANG BUM
分类号 H01L27/115;H01L21/336;H01L21/8247;H01L29/788;H01L29/792 主分类号 H01L27/115
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