DISPOSABLE PROTECTION FOR MICRO-ENGINEERED DEVICES

摘要

A device (100) is presented comprising a functional structure (101) that needs to be partially exposed and therefore mechanically unprotected during the usage of the device. This exposed functional structure is part of a micromachined device having also a part that is mounted and protected by an electronic package (102). A micromachined protection structure (103) is attached to the functional structure via at least one anchoring mechanism (104). The protection structure (103) can be detached by breaking the anchoring mechanism (104). Furthermore, a method to fabricate such a device (100) is presented.