摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a wastewater treatment method and apparatus which effectively use oxygen enriched air, which is a by-product gas of a nitrogen generator installed in semiconductor manufacturing facilities to realize a reduction of equipment cost as a total system, energy saving, space saving, and shortening of a purification time. <P>SOLUTION: In the treatment method and apparatus for purifying organic matter-containing wastewater, which is water to be treated, discharged from facilities using the nitrogen generator 1 producing high-purity nitrogen by separation from stock air, the oxygen-enriched air secondarily generated in the nitrogen generator 1 is supplied to the water 17 to be treated stored in an aerobic treatment tank 16 to aerate and purify the water 17 to be treated. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |