| 摘要 |
In order to enable non-shrinkage firing, the strength of a multilayer ceramic substrate is increased which is obtained by a method in which alternately stacking a base material layer and a constrained layer which is not sintered at the sintering temperature for the base material layer, and in a firing step, allowing the material of the base material layer to flow into the constrained layer while subjecting the base material layer to sintering, thereby achieving the densification of the constrained layer. The base material layer and the constrained layer each include celsian (BaAl 2 Si 2 O 8 ), and the abundance of celsian is lower in the base material layer than in the constrained layer. In order to increase the strength of the base material layer, the addition of a Ti component, rather than an increased content of Al component which interferes with sintering of the base material layer, causes fresnoite (Ba 2 TiSi 2 O 8 ) to be deposited in the base material layers. The presence of fresnoite in the base material layers increases crystal grain boundaries in the base material layers, and thus allows the development of cracking to be prevented, thereby allowing the strength of the multilayer ceramic substrate to be improved. |
