| 摘要 |
<p>An object of the present invention is to provide an ozone gas supply system capable of supplying an ozone gas to each ozone treatment apparatus while independently controlling the flow rate and the concentration of the ozone gas, and capable of supplying the ozone gas with a high reliability. The present invention includes an ozone gas output flow rate management unit (9) configured to receive a plurality of ozone gas outputs from a plurality of ozone generation units (7-1 to 7-n), and be capable of performing an ozone gas output flow rate control for selectively outputting one or a combination of two or more of the plurality of ozone gas outputs to any of a plurality of ozone treatment apparatuses (12-1 to 12-n) by means of an opening/closing operation of a plurality of ozone gas control valves (9a, 9b, 9c, 9bc, 9ab, 9ca) provided in the ozone gas output flow rate management unit.</p> |
