ROLL-TO-ROLL SPUTTER DEVICE PUMPING EFFICIENCY IMPROVEMENTS

摘要

PURPOSE: A roll to roll sputter apparatus with improved pumping efficiency is provided to form vacuum state proper to the growth condition of the substrate by using a high vacuum pump or moving the position of the high vacuum pump. CONSTITUTION: A roll to roll sputter apparatus with improved pumping efficiency comprises a chamber(100), a substrate transferring member(200), a substrate(400), and a target(300). The chamber comprises a low vacuum pump line(110) in the upper portion or the back portion, and comprises a high vacuum pump line in the back portion. The substrate moving member comprises an unwinding roller(210), a winding roller(220), a main roller(240), a plurality of tension rollers(230). The unwinding roller supplies substrate to the main roller. The main roller forms thin film deposition path.