<p>An ion beam system uses a separate accelerating electrode, such as a resistive tube, to accelerate the ions while maintaining a low electric field at an extended, that is, distributed ion source, thereby improving resolution. A magneto-optical trap can be used as the ion source.</p>
申请公布号
EP2478546(A2)
申请公布日期
2012.07.25
申请号
EP20100817985
申请日期
2010.09.20
申请人
FEI COMPANY;UNITED STATES OF AMERICA AS RESPRESENTED BY THE SECRETARY OF COMMERCE, THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLGY
发明人
MCCLELLAND, JABEZ, J.;KNUFFMAN, BRENTON, J.;STEELE, ADAM, V.;ORLOFF, JONATHAN, H.
