| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for keeping a precision of droplets stably for a long time. SOLUTION: A liquid-repelling coating is formed on the surface of a nozzle 103 of a liquid crystal material discharge apparatus and a diamond thin film containing diamond or a diamond-like carbon is exposed in the surface of the liquid-repelling coating. Since such a liquid-repelling coating has a high mechanical strength, not only the durability of the nozzle 103 is high but also the affinity with the liquid crystal materials is low and thus droplets of the liquid crystal materials are not spread even if being brought into contact with the side faces of the nozzle 103, and therefore no liquid stagnation occurs in the tip end of the nozzle 103 and neither discharge failure nor discharge direction error is caused. COPYRIGHT: (C)2009,JPO&INPIT |
