发明名称 |
Coating apparatus and method |
摘要 |
A coating apparatus includes a driving unit configured to rotate a substrate holding member about a vertical axis to spread a coating liquid supplied on a front side central portion of a substrate toward a front side peripheral portion of the substrate by a centrifugal force. The apparatus is provided with a wobble damping mechanism including a gas delivery port and a suction port both disposed to face a back side of the substrate and configured to damp a wobble of the substrate being rotated by delivering a gas from the delivery port and sucking the gas into the suction port. |
申请公布号 |
US8225737(B2) |
申请公布日期 |
2012.07.24 |
申请号 |
US20090394690 |
申请日期 |
2009.02.27 |
申请人 |
KITANO TAKAHIRO;OBATA KOICHI;INADA HIROICHI;OGATA NOBUHIRO;TOKYO ELECTRON LIMITED |
发明人 |
KITANO TAKAHIRO;OBATA KOICHI;INADA HIROICHI;OGATA NOBUHIRO |
分类号 |
B05C5/02 |
主分类号 |
B05C5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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