发明名称 |
METHOD OF MANUFACTURING PHOTOELECTRIC CONVERSION MODULE |
摘要 |
PURPOSE: A method of manufacturing photoelectric conversion module is provided to increase an array discord of an optical waveguide and an electrode pad by forming an optical waveguide core with use of a mask for an electrode pattern. CONSTITUTION: An optical polymer film is formed on upper and lower part of a photosensitive polymer(103) by laminating nonphotosensitive polymers(102). A metal substrate is laminated on the optical polymer film. An optical waveguide core(106) is formed on the optical polymer film by being exposed to the optic polymer film. A metal pad(108) is formed by removing a portion of the metal substrate pattern. A wall pad(107) is formed on the top of the metal pad. |
申请公布号 |
KR20120082692(A) |
申请公布日期 |
2012.07.24 |
申请号 |
KR20110004129 |
申请日期 |
2011.01.14 |
申请人 |
KOREA ELECTRONICS TECHNOLOGY INSTITUTE |
发明人 |
IM, YOUNG MIN;KIM, HWE KYUNG |
分类号 |
H01L31/042;G02B6/00 |
主分类号 |
H01L31/042 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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