| 摘要 |
PURPOSE: A tray and a substrate processing apparatus using the same are provided to load many substrates by uniting a plurality of support plates through a combining member. CONSTITUTION: A plurality of substrates is loaded on a board support plate(210). A guide frame(120) supports the board support plate which can be ascended and descended. The board support plate comprises two support plates, a plurality of combining member insertion holes, and a plurality of combining members(214a, 214b). The two support plates have combining units which are connected with each other. The plurality of combining members is respectively inserted into the plurality of combining member insertion holes and unites the two support plates. |
