Variable-tilt specimen holder and method and for monitoring milling in a charged-particle instrument

摘要

An apparatus for monitoring sample milling in a charged-particle instrument has a variable-tilt specimen holder attached to the instrument tilt stage. The variable-tilt specimen holder includes a first pivoting plate having a slot for holding a specimen rotatably supported in the specimen holder. The first pivoting plate has a range of rotation sufficient to move the axis of thinning of the specimen from a first position where the tilt stage is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen and the axis of the ion beam column of the instrument is greater than zero, to a second position where the axis for thinning of the specimen is substantially parallel to the axis of the ion-beam column. A light detector intercepts light passing through the specimen as it is thinned to determine an endpoint for milling of the specimen.