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发明名称
PROBE MEMBER FOR WAFER INSPECTION, PROBE CARD FOR WAFER INSPECTION AND WAFER INSPECTION APPARATUS
摘要
申请公布号
KR101167748(B1)
申请公布日期
2012.07.23
申请号
KR20077010582
申请日期
2005.11.10
申请人
发明人
分类号
H01L21/66;G01R1/073
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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