| 摘要 |
<p>PURPOSE: Holder assembly for semiconductor material transfer is provided to prevent a guide rail and an elevation block to be damaged by moment. CONSTITUTION: A guide rail(20) is extended in upward and downward directions. An elevation block(30) is combined with the guide rail which can be ascended and descended. The rear side of an extension arm(40) is fixed and combined with the elevation block. A lead screw(50) is normally and inversely rotated by a driving motor. The lead screw is parallel to the guide rail. The lead screw passes through the elevation block in upward and downward directions. A picker(70) is fixed and combined with a tip-end portion of the extension arm and picks up a wafer.</p> |
