DYNAMIC MODE ATOMIC FORCE MICROSCOPY DEVICE

摘要

FIELD: physics. ^ SUBSTANCE: dynamic mode atomic force microscopy (AFM) device has a scanner 3 for performing three-dimensional relative scanning of the cantilever 2 and the sample 1; apparatus 8 for generating an alternating current signal at resonance frequency in a mode with bending vibrations of the cantilever 2; apparatus 9 for exciting bending vibrations of the cantilever 2 with resonance frequency; apparatus 10 for generating an alternating current signal at a second frequency which is lower than said frequency of bending vibrations; apparatus 11 for modulating the distance probe 2A-sample 1 of the cantilever 2 through the second frequency; apparatus 5 for detecting fluctuation of the resonance frequency; apparatus 4 for detecting vibration of the cantilever; and apparatus 6 for detecting the fluctuation component contained in the detected signal using the apparatus 5 for detecting fluctuation of resonance frequency, and which is synchronised with the signal for modulating the distance probe 2A-sample 1. The slope of the resonance frequency relative the distance probe 2A-sample 1 is obtained from the power and polarity of said fluctuation component. ^ EFFECT: high rate of identifying atoms of a surface. ^ 6 cl, 15 dwg