MATERIAL FOR ETCHING PLASMA ETCHING METHOD,申请号KR20090069388-传众专利搜索

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发明名称	MATERIAL FOR ETCHING PLASMA ETCHING METHOD
摘要
申请公布号	KR101167624(B1)	申请公布日期	2012.07.20
申请号	KR20090069388	申请日期	2009.07.29
申请人		发明人
分类号	H01L21/3065;H01L21/8242	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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