| 摘要 |
A MEMS gyroscope includes: a microstructure (2) having a fixed structure (6), a driving mass (7), movable with respect to the fixed structure (6) according to a driving axis (X), and a sensing mass (8), mechanically coupled to the driving mass (7) so as to be drawn in motion according to the driving axis (X) and movable with respect to the driving mass (7) according to a sensing axis (Y), in response to rotations of the microstructure (2); and a driving device (3), for keeping the driving mass (7) in oscillation with a driving frequency (É D ). The driving device (3) includes a discrete-time sensing interface (20), for detecting a position (x) of the driving mass (7) with respect to the driving axis (X) and a control stage (21, 23, 24, 25) for controlling the driving frequency (É D ) on the basis of the position (x) of the driving mass (7). |
