| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily individually adjust the shape and the size of spots of laser beams to be used concurrently. <P>SOLUTION: The laser beam λa forms an image by a lens 120a at the image-forming position P1a, then is collimated by a lens 121a, and enters a dual-wavelength mirror 123. The laser beam λb forms an image by a lens 120b at the image-forming position P1b, and is collimated by a lens 121b, reflected by a total reflection mirror 122, and enters the dual-wavelength mirror 123. The optical paths of the laser beam λa and the refrigerant λb are coupled with each other by the dual-wavelength mirror 123, and the image formation is performed at the image-forming position P2 by a dual-wavelength lens 124. The present invention is applicable to, for example, a laser beam machining apparatus for machining a thin film solar battery panel. <P>COPYRIGHT: (C)2012,JPO&INPIT |
