| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic EL device capable of suppressing a short-circuit between a pixel electrode and a counter electrode. <P>SOLUTION: A manufacturing method of an organic EL device comprises: a step of forming a pixel electrode; a first cleaning step of cleaning a surface of the pixel electrode; a step of forming a first oxide layer with a material which is composed of an inorganic compound and has a hole transporting property on the pixel electrode when a foreign matter which could not be removed by the first cleaning step or which adhered during the first cleaning step exists on the pixel electrode; a second cleaning step of removing the foreign matter existing on the pixel electrode by cleaning a surface of the first oxide layer; a step of forming a second oxide layer with a material which is composed of an inorganic compound and has the hole transporting property and whose resistivity is lower than a resistivity of the first oxide layer on the first oxide layer and the pixel electrode exposed from the first oxide layer after the second cleaning step; a step of forming an organic layer on the second oxide layer; and a step of forming a counter electrode on the organic layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
