发明名称 MACHINING DEVICE AND MACHINING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a machining device that is capable of more effectively utilizing grinding liquid containing fine bubbles to machining of plate like objects of a machining tool. <P>SOLUTION: The machining device for machining the plate like object W by a rotating disk like machining tool 18 cutting in, has the first mechanisms 14, 15 for spraying the first grinding liquid containing fine bubbles to the end face of the side cutting into the plate like object W of the rotating machining tool 18 and the second mechanisms 16, 17 for spraying the second grinding liquid containing the fine bubbles to at least one of both side surfaces of the rotating machining tool 18, the size of the fine bubbles contained in the second grinding liquid is larger than the size of the fine bubbles contained in the first grinding liquid. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012135869(A) 申请公布日期 2012.07.19
申请号 JP20110267444 申请日期 2011.12.07
申请人 SHIBAURA MECHATRONICS CORP 发明人 HIROSE HARUMICHI;MAKINO TSUTOMU
分类号 B24B55/02;H01L21/301 主分类号 B24B55/02
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