发明名称 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 According to one embodiment, a semiconductor memory device includes a semiconductor substrate, memory cell array portion, single-crystal semiconductor layer, and circuit portion. The memory cell array portion is formed on the semiconductor substrate, and includes memory cells. The semiconductor layer is formed on the memory cell array portion, and connected to the semiconductor substrate by being formed in a hole extending through the memory cell array portion. The circuit portion is formed on the semiconductor layer. The Ge concentration in the lower portion of the semiconductor layer is higher than that in the upper portion of the semiconductor layer.
申请公布号 US2012181602(A1) 申请公布日期 2012.07.19
申请号 US201213346888 申请日期 2012.01.10
申请人 FUKUZUMI YOSHIAKI;AOCHI HIDEAKI;KITO MASARU;MIYANO KIYOTAKA;MORI SHINJI;MIZUSHIMA ICHIRO 发明人 FUKUZUMI YOSHIAKI;AOCHI HIDEAKI;KITO MASARU;MIYANO KIYOTAKA;MORI SHINJI;MIZUSHIMA ICHIRO
分类号 H01L27/105;H01L21/8239 主分类号 H01L27/105
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