Method for measuring shape of surface of test object, involves measuring thickness distribution of surface layer, and irradiating test beam on surface of test object, overlying reference beam with test beam

摘要

The method involves measuring thickness distribution of a surface layer (16), and irradiating a test beam (26) on a surface (14) of a test object (12), overlying a reference beam with the test beam after reflection of the test beam at the test object. The phase of the reference beam is varied and the intensity distribution generated by the application of the test beam with reference beam of different phase is recorded. The shape of the surface is determined by clearing the applied intensity distribution with the measured thickness distribution of the surface layer. Independent claims are also included for the following: (1) a measuring arrangement for measuring shape of a surface of a test object; and (2) an evaluation device for determining shape of a surface of a test object.