| 摘要 |
A technique for detecting external force applied to a piezoelectric plate is provided. A crystal plate is cantilever-supported in a container. Excitation electrodes are formed on an upper face and lower face, respectively, of the crystal plate. A movable electrode is formed on the lower face side. A fixed electrode is provided on a bottom portion of the container facing the movable electrode. The excitation electrode on the upper face side and the fixed electrode are connected to an oscillation circuit. When the crystal plate bends by external force applied, capacitance between. A direction of the movable electrode along a length direction of the crystal plate is set to 30° to 60°, relative to a face orthogonal to an intended direction of the external force. The movable electrode and fixed electrode changes, and this capacitance change and a deformation of the crystal circuit.
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