STANDARD MEMBER FOR CALIBRATION, MANUFACTURING METHOD THEREOF, AND SCANNING ELECTRON MICROSCOPE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a standard member performing calibration of magnification used for an electron microscope in an automatic and stable manner with high accuracy.

SOLUTION: On the same surface, a standard member for calibration has: multilayer film cross sections formed by alternately laminating materials different from each other; a plurality of first mark patters interposing a first silicon layer therebetween and being disposed in parallel with the multilayer film cross sections; at least a pair of second mark patterns interposing a second silicon layer having a thickness larger than that of the first silicon layer therebetween at an opposite side to the plurality of first mark patterns with respect to the multilayer film cross sections and being disposed in parallel with the multilayer film cross sections; and a silicon layer disposed outside the first mark patterns and the second mark patterns with respect to the multilayer film cross sections.

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