| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electromagnetic casting method of a silicon ingot capable of reducing an oxygen concentration and a carbon concentration in a cast ingot. <P>SOLUTION: When replacing an atmosphere in a chamber with an inert gas atmosphere before casting a silicon ingot, replacement processing is performed once or more. The replacement processing includes: an evacuation step S1 for evacuating the inside of the chamber to prescribed vacuum pressure by discharging the atmosphere in the chamber; a vacuum pressure maintaining step S2 for discharging the atmosphere in the chamber while maintaining the pressure in the chamber at the vacuum pressure; a pressure recovery step S3 for recovering the pressure in the chamber to prescribed set pressure by supplying inert gas into the chamber; and a set pressure maintaining step S4 for maintaining the pressure in the chamber at the set pressure by supplying inert gas into the chamber, and by discharging the atmosphere in the chamber where an after-heater is baked in the vacuum pressure maintaining step S2 and the set pressure maintaining step S4. <P>COPYRIGHT: (C)2012,JPO&INPIT |
