PIXEL DESIGN FOR IMPROVING THE FILL FACTOR IN A MICROBOLOMETER
摘要
According to one embodiment of the present invention, a bolometer array, having an arrangement of bolometer pixels and a pixel design for improving fill factor in a microbolometer, comprises: a lower layer including a reflective metal layer formed on a substrate; a cavity formed in the lower layer; an upper layer including a bolometer layer formed on the cavity and a permeable metal layer formed on the bolometer layer; an insulation layer for insulating the lower layer and the upper layer; and an anchor for supporting the upper layer, wherein four pixels of the bolometer share said single anchor.
申请公布号
WO2012096478(A2)
申请公布日期
2012.07.19
申请号
WO2012KR00135
申请日期
2012.01.06
申请人
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY;KIM, HYEOUN;KIM, KYOUNG MIN;KIM, BYEONG IL;PARK, JAE HONG;LEE, KWY RO
发明人
KIM, HYEOUN;KIM, KYOUNG MIN;KIM, BYEONG IL;PARK, JAE HONG;LEE, KWY RO