SCANNING ELECTRON MICROSCOPE

摘要

Provided is an electron microscope wherein a conventionally available evacuation assembly is used, such as a turbo-molecular pump, an ion pump, or a rotary pump, implementing a device with which it is possible to safely execute observation or adsorption of a high-rarity object. A safe SEM which has a low risk of electrical discharge is implemented by comprising: a probe; a means for replacing the interior of a specimen chamber with a prescribed gas; and a means for imaging by ion current detection or absorbed current detection. Additionally, a means is disposed for controlling the polarity of the voltage which is imparted to the probe. Furthermore, a control means is disposed for controlling the imparted voltage value to the probe according to the degree of vacuum within the specimen chamber.