| 发明名称 |
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME |
| 摘要 |
A semiconductor device may include an upper interconnection on a substrate and an anti-reflection pattern disposed on the upper interconnection. The anti-reflection pattern may include a compound including a metal, carbon and nitrogen. |
| 申请公布号 |
US2012181693(A1) |
申请公布日期 |
2012.07.19 |
| 申请号 |
US201113241741 |
申请日期 |
2011.09.23 |
| 申请人 |
KIM JEEYONG;PARK JONG-HYUN;KANG JIN-KYU;LEE JOONHEE;SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM JEEYONG;PARK JONG-HYUN;KANG JIN-KYU;LEE JOONHEE |
| 分类号 |
H01L23/532 |
主分类号 |
H01L23/532 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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