| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ion microscope capable of assessing quality of a conductive tip (needle-like electrode tip) used in a gas field ion source (electrical field ionization gas ion source). <P>SOLUTION: A microscope system 200 comprises: a He ion source; a first lens 216; axis adjusting deflectors 220 and 222; a diaphragm 224; scanning deflectors 219 and 221; an ion optical device 130 including a second lens 226; and a sample chamber. He ions emitted from a conductive tip 186 as an ion source are irradiated to a sample 180. The sample is observed by detecting particles emitted from the sample with detectors 150, 160. The microscope system 200 can also be operated in a field-ion microscope (FIM) mode. In this case, the detectors are to be placed at the position of the sample 180, and electrical field emission patters of He ions emitted from the conductive tip 186 are to be observed with the detectors. The characteristics of the conductive tip are assessed from the patterns so as to determine whether it is suitable or not to use the conductive tip in an ion microscope. <P>COPYRIGHT: (C)2012,JPO&INPIT |
