| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a development processing device, which is capable of suppressing a usage amount of new liquid while hardly causing a filter to be clogged due to deterioration of developer, of a large-sized color filter forming substrate. <P>SOLUTION: A development processing device has conveying means conveying a workpiece 80 with a treatment surface turned upward in an inclining manner from the horizon in a direction perpendicular to a conveyance direction. Developer 41a, with which the workpiece 80 is showered at individual positions in the conveyance direction in a development processing tank 10, flows along an inclined surface of the treatment surface of the workpiece 80 so as to flow down from the workpiece 80. Waste liquid collecting means 61 receiving and collecting the developer 41a after development processing having flowed down from the workpiece 80 in a predetermined positional range in the conveyance direction so as to cause collected developer 41a after development processing to flow into a waste liquid line is disposed between a bottom section and the workpiece 80 being conveyed in the development processing tank 10. <P>COPYRIGHT: (C)2012,JPO&INPIT |
