| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic wiring board for probe card in which separation of an insulating substrate and an internal wiring layer can be prevented. <P>SOLUTION: A mullite sintered compact has a first region existing at least partially around an internal wiring layer, and a second region other than the first region. When measured by X-ray diffraction, the ratio of main peak intensity of alumina to main peak intensity of mullite in the first region is 0.4 or more, and the ratio of main peak intensity of alumina to main peak intensity of mullite in the second region is 0.3 or less. <P>COPYRIGHT: (C)2012,JPO&INPIT |
