| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem in which, though it is important to specify in which layer a foreign matter exists in an earlier stage in a case where a defect such as the foreign matter existing in a multilayer structure that is laminated with a transparent film and an opaque film and composes TFT or CF occurs, a place in which the foreign matter exists looks opaque in an observation using a scanning electron microscope, SEM, and, in addition, working efficiency is low in an observing method for observing a section processed by a focused ion beam, FIB, by using the scanning electron microscope. <P>SOLUTION: In a case where a defect such as a foreign matter existing in a liquid crystal panel, an inspection method of the liquid crystal panel according to the present invention comprises the steps of: focusing an optical microscope on the foreign matter; sequentially focusing the optical microscope on a plurality of opaque dummy patterns formed in a visual field range of the optical microscope, to be more specific, on the same pixel as the foreign matter or on an adjacent pixel; and specifying a layer in which the foreign matter exists. <P>COPYRIGHT: (C)2012,JPO&INPIT |
