| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small-sized laser beam generator capable of stably oscillating continuous light of a wavelength region of about 200 nm or less at high conversion efficiency. <P>SOLUTION: The light of a wavelength λ<SB POS="POST">1</SB>output from a first laser beam generator 10 and the light of a wavelength λ<SB POS="POST">2</SB>output from a second laser beam generator 11 are supplied into a first resonator 13 and a second resonator 14, respectively, and the light of a wavelength λ<SB POS="POST">3</SB>is generated by sum frequency blending of the two incident lights in a nonlinear optical element 15 included in both of the first resonator 13 and the second resonator 14. In this case, the lights of the wavelengths λ<SB POS="POST">1</SB>, λ<SB POS="POST">2</SB>, λ<SB POS="POST">3</SB>are made incident on and emitted from the nonlinear optical element 15 in a mutually and spatially separated state, and they have mutually different light paths. The lights of the wavelengths λ<SB POS="POST">1</SB>, λ<SB POS="POST">2</SB>are set so that their optical axes do not completely match with each other, and if the angle of incidence or the angle of emission of one of these lights is the Brewster angle, reflection loss is further reduced. <P>COPYRIGHT: (C)2012,JPO&INPIT |
