| 摘要 |
<P>PROBLEM TO BE SOLVED: To quickly perform detection of a flaw and specification of a position of the flaw at the same time in ultrasonic flaw detection of an object surface. <P>SOLUTION: An ultrasonic sensor formed by arranging a plurality of piezoelectric elements is operated in the phased array mode. At least a part of the ultrasonic sensor is immersed into a liquid. The incident angle of an ultrasonic wave sent from the ultrasonic sensor is continuously changed within a range including a first angular range generating a surface wave on the surface of an inspection object and a second angular range allowing the ultrasonic sensor to receive a reflected wave, reflected on the surface of the inspection object, again. The recorded signal of the surface wave is displayed as a three-dimensional image and three-dimensional curved surface of an inspection object surface generated from the reflected wave, at the same time at a position corrected based on the transmission path of the surface wave. <P>COPYRIGHT: (C)2012,JPO&INPIT |
