| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heat accumulator that is suitably used for a processing apparatus and a processing method by which the inside of a treatment furnace can be efficiently heated even when endothermic reaction occurs. <P>SOLUTION: The heat accumulator, used for a processing apparatus and a processing method for heating the inside of a treatment furnace, includes a casing 30, a heat reservoir 33 provided in the casing 30 and a heat reservoir holder 51 for holding the heat reservoir 33. The heat reservoir holder 51 is provided at the bottom 30c of the casing 30 without contact with the sidewall of the casing 30. <P>COPYRIGHT: (C)2012,JPO&INPIT |
