| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow rate control device capable of easily adjusting a flow rate of a medium. <P>SOLUTION: The flow rate control device comprises: a pressure source side flow path 24d connected to a pressure source 24c; a particle size distribution measuring apparatus side flow path 24d connected to measurement space 83 of a particle size distribution measuring apparatus 1; at least two flow paths 32a-32c for flow rate adjustment formed so as to connect between the pressure source side flow path 24d and the particle size distribution measuring apparatus side flow path 24d; an opening and closing mechanism 34 which can open and close each of the flow paths 32a-32c for flow rate adjustment so as to be in either a flowable state or a non-flowable state respectively; and a control part 17 for controlling the opening and closing mechanism 34. <P>COPYRIGHT: (C)2012,JPO&INPIT |
