| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a glass substrate for a hard disk capable accurately controlling a polishing step without deteriorating micro-waviness of a glass substrate and capable of suppressing adhesion of damages to the glass substrate. <P>SOLUTION: In a method for manufacturing a glass substrate for a hard disk comprising a polishing step in which the glass substrate surface is polished by using a polishing slurry containing polishing slurry particles, the effective particle size of the polishing slurry particles is changed with the passage of time in the polishing step. The polishing step is preferably carried out by means for changing the surface potential of the polishing slurry particles with the passage of time. In addition, in the above step, an AC current is preferably applied to the polishing slurry particles and the pH of the polishing slurry is preferably changed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
