发明名称 WIRING STRUCTURE, SEMICONDUCTOR DEVICE, AND METHOD OF IDENTIFYING DEFECTIVE PORTION
摘要 <P>PROBLEM TO BE SOLVED: To provide a wiring structure capable of achieving an easy identification of a defective portion, to provide a semiconductor device, and to provide a method of identifying a defective portion. <P>SOLUTION: A wiring structure comprises first wiring 14 formed above a substrate 10, and second wiring 20 that is formed above the first wiring and overlaps the first wiring in a first region. The first wiring has first tabs 16 protruding outside the first region. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012138456(A) 申请公布日期 2012.07.19
申请号 JP20100289408 申请日期 2010.12.27
申请人 FUJITSU LTD 发明人 MIZUSHIMA MASAKO
分类号 H01L21/768;G01R31/28;G01R31/302;H01L21/3205;H01L21/66;H01L21/822;H01L23/522;H01L27/04 主分类号 H01L21/768
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