| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a take-up type continuous film-forming apparatus capable of forming a film having laterally uniformed quality on a base material having an extended width while facilitating the maintenance and preparation operations to a film forming source, film-forming rolls, a guide roll group and a film-forming mask which are enlarged to attain high productivity. <P>SOLUTION: The take-up type continuous film-forming apparatus 1 includes: a vacuum chamber 2; a pair of film-forming rolls 3, 3, which are disposed in the vacuum chamber 2; and film-forming sources 4, 4 for forming a film on the surface of a base material W which is wound on the pair of film-forming rolls 3, 3. The vacuum chamber 2 includes: a cylindrical chamber body 10 having front and rear walls 6, 7 and upper and lower walls 8, 9; and lateral sidewalls 11, 12, which are openable and closable relative to the chamber body 10. In the front and rear walls 6, 7 and/or the upper and lower walls 8, 9 of the chamber body 10, a gateway section 30 is provided to allow entrance and exit of an operator to and from an inter-roll region between the film-forming rolls 3, 3. <P>COPYRIGHT: (C)2012,JPO&INPIT |
