| 发明名称 |
PROCESS FOR PRODUCING REFINED AMINOSILANE |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-purity aminosilane reduced in halogen impurities suitable for electronic material applications and the like. <P>SOLUTION: The process for producing a refined aminosilane having a Si-N bond and no Si-halogen bond includes at least: a step of treating an aminosilane containing 1 ppm (w/w) or more of halogens as impurities with an alkylmetal reagent; and a step of distilling the treated aminosilane. <P>COPYRIGHT: (C)2012,JPO&INPIT |
| 申请公布号 |
JP2012136472(A) |
申请公布日期 |
2012.07.19 |
| 申请号 |
JP20100289929 |
申请日期 |
2010.12.27 |
| 申请人 |
SHIN-ETSU CHEMICAL CO LTD |
发明人 |
HAMADA YOSHITAKA;HIRAHARA KAZUHIRO |
| 分类号 |
C07F7/20;C07F7/10 |
主分类号 |
C07F7/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
